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Lab of Micro Structure Technology

Prof. Neyer

Prof. Dr.-Ing. Andreas Neyer

Technical University of Dortmund
Department of Electrical Engineering and Information Technology
Lab of Micro Structure Technology



Technical University of Dortmund, Faculty ET / IT
AG MST - Prof. A. Neyer
Friedrich-Wöhler-Weg 4, 44227 Dortmund
Tel.: +49-(0)231 / 755-3728   Fax: -3729



The objectives of the microfluidic group are the development and fabrication of miniaturized analytical systems in polymer materials. The fabrication process of the microfluidic systems is based on hot embossing technology of polymethylmethacrylat (PMMA) or replica casting technique of polydimethylsiloxane (PDMS).

The spectrum of within the present projects realised chips comprised polymer chips for:

  • capillary electrophoresis (CE), isotachophoresis (ITP) separations techniques.

  • combination of electrospray ionization mass spectrometry (ESI-MS) with electrophoretic separation techniques

  • detection of DNA directed immobilisation (DDI).

Polymeric integrated optic single-mode components

Industrial scale production technologies


The key idea of developing a technology capable of producing single-mode integrated optic components at industrial scale reaches back to the foundation of AG MST in 1994. Since then the back bone of single-mode research at AG MST were the EU-founded projects 'POPCORN' (1995-1998) and 'APPTech' (2001-2004).

The basic approach was to reduce the production costs per integrated component significantly by mass production. Base materials were chosen to be polymers due to their easy and versatile processability and their low procurement costs compared to silicon and silica technologies. In addition to pure process development, also specialised polymeric materials were developed at AG MST. Main focus were fluorinated polymers.

Basic technologies

  • Hot embossing
  • Injection molding
  • 'Casting & Blading' technology

Applied materials (fluorinated and non-fluorinated)

  • Acrylates and methacrylates
  • Lactones
  • Epoxies
  • Elastomeric materials, e.g. PDMS